@prefix sampledescriptionvocabulary1: <https://purls.helmholtz-metadaten.de/skosmos/sdv/> .
@prefix skos: <http://www.w3.org/2004/02/skos/core#> .
@prefix ns0: <http://server/unset-base/> .

sampledescriptionvocabulary1:MechanicalStress
  skos:prefLabel "Mechanical stress" ;
  skos:narrower sampledescriptionvocabulary1:vibration, sampledescriptionvocabulary1:Pressure ;
  skos:definition "1. Mechanical stress refers to the internal forces within a material that arise from factors such as film structural properties and thermal expansion coefficients. It can cause device degradation and affect the diffusion behavior of impurities during processing. (ScienceDirect, AI generated definition based on: Rapid Thermal Processing, 1993). 2. A physical force that acts on an object and can damage or change the shape of the object (Cambridge dictionary)"^^ns0:None ;
  skos:broader sampledescriptionvocabulary1:SampleSensitivityFactor ;
  a skos:Concept .

sampledescriptionvocabulary1:vibration
  skos:prefLabel "Vibration" ;
  a skos:Concept ;
  skos:broader sampledescriptionvocabulary1:MechanicalStress .

sampledescriptionvocabulary1:Pressure
  skos:prefLabel "Pressure" ;
  a skos:Concept ;
  skos:broader sampledescriptionvocabulary1:MechanicalStress .

sampledescriptionvocabulary1:SampleSensitivityFactor
  skos:prefLabel "Sample sensitivity factor" ;
  a skos:Concept ;
  skos:narrower sampledescriptionvocabulary1:MechanicalStress .