Mechanical stress
type: Concept
broader: Sample sensitivity factor
definition: 1. Mechanical stress refers to the internal forces within a material that arise from factors such as film structural properties and thermal expansion coefficients. It can cause device degradation and affect the diffusion behavior of impurities during processing. (ScienceDirect, AI generated definition based on: Rapid Thermal Processing, 1993). 2. A physical force that acts on an object and can damage or change the shape of the object (Cambridge dictionary)
narrower: Vibration
narrower: Pressure

Pressure
type: Concept
broader: Mechanical stress

Sample sensitivity factor
type: Concept
narrower: Mechanical stress

Vibration
type: Concept
broader: Mechanical stress