优选词，正式主题词
Ion Beam deposition
定义
某概念特定涵义的完全解释- 1. Ion beam deposition (IBD) is a process of applying materials to a target through the application of an ion beam. (Wikipedia). 2. Ion beam deposition (IBD) is a thin film deposition method that produces the highest quality films with excellent precision. Also referred to as ion beam sputtering (IBS), it’s a process that’s used when tight control over film thickness and stoichiometry is needed. (https://www.dentonvacuum.com/what-is-ion-beam-deposition/)
上位概念
上位概念其它语言
其它语言中概念术语- Ion Beam deposition
URI
https://purls.helmholtz-metadaten.de/skosmos/sdv/IonBeamDeposition