优选词，正式主题词
Electron beam deposition
定义
某概念特定涵义的完全解释- A synthesis method where an electron beam is used to decompose gaseous molecules leading to deposition of a solid on a nearby substrate. (Ontobee, Chemical Methods Ontology)
上位概念
上位概念其它语言
其它语言中概念术语- Electron beam deposition
URI
https://purls.helmholtz-metadaten.de/skosmos/sdv/ElectronBeamDeposition