优选词，正式主题词
Atomic layer deposition
定义
某概念特定涵义的完全解释- 1. A thin film deposition technique based on the sequential reaction of gaseous precursors at a surface to produce a monolayer (Ontobee, Chemical Methods Ontology). 2. Atomic layer deposition (ALD) is a thin-film deposition technique based on the sequential use of a gas-phase chemical process; it is a subclass of chemical vapour deposition. (Wikipedia)
上位概念
上位概念其它语言
其它语言中概念术语- Atomic layer deposition
URI
https://purls.helmholtz-metadaten.de/skosmos/sdv/AtomicLayerDeposition