Termo preferencial
Atomic layer deposition
Definição
Explicação detalhada sobre o significado pretendido de um conceito- 1. A thin film deposition technique based on the sequential reaction of gaseous precursors at a surface to produce a monolayer (Ontobee, Chemical Methods Ontology). 2. Atomic layer deposition (ALD) is a thin-film deposition technique based on the sequential use of a gas-phase chemical process; it is a subclass of chemical vapour deposition. (Wikipedia)
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Conceito mais amploEm outros idiomas
Termos deste conceito em outros idiomas.- Atomic layer deposition
URI
https://purls.helmholtz-metadaten.de/skosmos/sdv/AtomicLayerDeposition