Naar hoofdinhoud

SampleDescriptionVocabulary

Zoek in woordenlijst

Content-taal

Conceptinformatie

... > Physical system > Processing and Treatment (for both Material and Sample) > Treatment > Surface treatment > Mechanical and surface treatment > Mechanical and surface treatment method > Coating treatment > Coating method > Deposition coating > Sputter coating
... > Physical system > Processing and Treatment (for both Material and Sample) > Treatment > Surface treatment > Coating treatment > Coating method > Deposition coating > Sputter coating

Voorkeursterm

Sputter coating  

Definitie

  • 1. Sputter coating in scanning electron microscopy is a sputter deposition process[clarification needed] to cover a specimen with a thin layer of conducting material, typically a metal, such as a gold/palladium (Au/Pd) alloy. (Wikipedia). 2. A synthesis technique where a solid target is bombarded with electrons or energetic ions (e.g. Ar+) causing atoms to be ejected ('sputtering'). The ejected atoms then deposit, as a thin-film, on a substrate. (TIB, Chemical Methods Ontology)

Breder concept

URI

https://purls.helmholtz-metadaten.de/skosmos/sdv/SputterCoating

Download dit concept:

RDF/XML TURTLE JSON-LD