Termine preferito
Atomic layer deposition
Definizione
Una spiegazione completa del significato inteso di un concetto- 1. A thin film deposition technique based on the sequential reaction of gaseous precursors at a surface to produce a monolayer (Ontobee, Chemical Methods Ontology). 2. Atomic layer deposition (ALD) is a thin-film deposition technique based on the sequential use of a gas-phase chemical process; it is a subclass of chemical vapour deposition. (Wikipedia)
Concetto più generale
Concetto più generaleIn altre lingue
Termini per il concetto in altre lingue- Atomic layer deposition
inglese
URI
https://purls.helmholtz-metadaten.de/skosmos/sdv/AtomicLayerDeposition