اصطلاح مرجح
Reactive ion etching
تعریف
توضیح کامل برای معنی بار شده به یک مفهوم- 1. RIE is like sputtering in the argon chamber, but the polarity is reversed and different gas mixtures are used. The atoms on the surface of the wafer fly away, leaving it bare. (Britannica). 2. Reactive-ion etching (RIE) is an etching technology used in microfabrication. RIE is a type of dry etching which has different characteristics than wet etching. RIE uses chemically reactive plasma to remove material deposited on wafers. The plasma is generated under low pressure (vacuum) by an electromagnetic field. High-energy ions from the plasma attack the wafer surface and react with it.(Wikipedia)
مفهوم اعم
مفهوم اعمدر زبان های دیگر
اصطلاحها در زبانهای دیگر برای این مفهوم- Reactive ion etching
English
URI
https://purls.helmholtz-metadaten.de/skosmos/sdv/ReactiveIonEtching