Preferred term
Sputter coating
Definition
A complete explanation of the intended meaning of a concept- 1. Sputter coating in scanning electron microscopy is a sputter deposition process[clarification needed] to cover a specimen with a thin layer of conducting material, typically a metal, such as a gold/palladium (Au/Pd) alloy. (Wikipedia). 2. A synthesis technique where a solid target is bombarded with electrons or energetic ions (e.g. Ar+) causing atoms to be ejected ('sputtering'). The ejected atoms then deposit, as a thin-film, on a substrate. (TIB, Chemical Methods Ontology)
Broader concept
Broader conceptIn other languages
Terms for the concept in other languages.- Sputter coating
English
URI
https://purls.helmholtz-metadaten.de/skosmos/sdv/SputterCoating