Preferred term
Ion Beam
Definition
A complete explanation of the intended meaning of a concept- 1. Directed flux of charged atoms or molecules. (IUPAC). 2. In IBM a stream of charged atoms (ions) of an inert gas, such as argon, is accelerated in a vacuum by high energies and directed toward a solid workpiece. The beam removes atoms from the workpiece by transferring energy and momentum to atoms on the surface of the object. When an atom strikes a cluster of atoms on the workpiece, it dislodges between 0.1 and 10 atoms from the workpiece material. (Britannica).
Broader concept
Broader conceptIn other languages
Terms for the concept in other languages.- Ion Beam
URI
https://purls.helmholtz-metadaten.de/skosmos/sdv/IonBeam