Preferred term
Electron beam deposition
Definition
A complete explanation of the intended meaning of a concept- A synthesis method where an electron beam is used to decompose gaseous molecules leading to deposition of a solid on a nearby substrate. (Ontobee, Chemical Methods Ontology)
Broader concept
Broader conceptIn other languages
Terms for the concept in other languages.- Electron beam deposition
URI
https://purls.helmholtz-metadaten.de/skosmos/sdv/ElectronBeamDeposition