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... > Physical system > Processing and Treatment (for both Material and Sample) > Treatment > Surface treatment > Mechanical and surface treatment > Mechanical and surface treatment method > Coating treatment > Coating method > Deposition coating > Atomic layer deposition
... > Physical system > Processing and Treatment (for both Material and Sample) > Treatment > Surface treatment > Coating treatment > Coating method > Deposition coating > Atomic layer deposition

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Atomic layer deposition  

Definition

  • 1. A thin film deposition technique based on the sequential reaction of gaseous precursors at a surface to produce a monolayer (Ontobee, Chemical Methods Ontology). 2. Atomic layer deposition (ALD) is a thin-film deposition technique based on the sequential use of a gas-phase chemical process; it is a subclass of chemical vapour deposition. (Wikipedia)

Oberbegriff

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  • Atomic layer deposition

URI

https://purls.helmholtz-metadaten.de/skosmos/sdv/AtomicLayerDeposition

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