Foretrukken term
Atomic layer deposition
Definition
En fyldestgørende beskrivelse af betydningen af et begreb.- 1. A thin film deposition technique based on the sequential reaction of gaseous precursors at a surface to produce a monolayer (Ontobee, Chemical Methods Ontology). 2. Atomic layer deposition (ALD) is a thin-film deposition technique based on the sequential use of a gas-phase chemical process; it is a subclass of chemical vapour deposition. (Wikipedia)
Overbegreb
OverbegrebPå andre sprog
Termer for begrebet på andre sprog.- Atomic layer deposition
URI
https://purls.helmholtz-metadaten.de/skosmos/sdv/AtomicLayerDeposition