Concept information
优选词，正式主题词
Evaporation/physical vapor deposition
定义
- Physical vapor deposition (PVD), sometimes called physical vapor transport (PVT), describes a variety of vacuum deposition methods which can be used to produce thin films and coatings on substrates including metals, ceramics, glass, and polymers. PVD is characterized by a process in which the material transitions from a condensed phase to a vapor phase and then back to a thin film condensed phase. (Wikipedia)
URI
https://purls.helmholtz-metadaten.de/evoks/sdv/evaporationPhysicalVaporDeposit
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