Hoppa till innehållet

sampleDescription

Sök i vokabulär

Innehållets språk

Begreppsinformation

Preparation action > Mechanical and surface > Mechanical and surface method > Sputtering
... > Parent > Parent type > Sample > Material description > Material treatment > Mechanical and surface > Mechanical and surface method > Sputtering

Föredragen term

Sputtering  

Definition

  • In physics, sputtering is a phenomenon in which microscopic particles of a solid material are ejected from its surface, after the material is itself bombarded by energetic particles of a plasma or gas (Wikipedia)

Överordnat begrepp

URI

https://purls.helmholtz-metadaten.de/evoks/sdv/sputtering

Ladda ned detta begrepp:

RDF/XML TURTLE JSON-LD