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... > Parent > Parent type > Sample > Material description > Material treatment > Deposition coating > Deposition coating method > Sputter coating

Föredragen term

Sputter coating  

Definition

  • A piece of apparatus, consisting of an anode (the specimen) a cathode (the source of sputter atoms or 'target') and a magnet, all held inside a vacuum chamber, which is used to coat specimens with a thin layer of atoms (e.g. Au) prior to microscopy. (TIB, Chemical Methods Ontology)

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URI

https://purls.helmholtz-metadaten.de/evoks/sdv/sputterCoating

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