Информация о концепции
Предпочитаемый термин
Sputtering
Определение
- In physics, sputtering is a phenomenon in which microscopic particles of a solid material are ejected from its surface, after the material is itself bombarded by energetic particles of a plasma or gas (Wikipedia)
Концепция более широкого понятия
URI
https://purls.helmholtz-metadaten.de/evoks/sdv/sputtering
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