Информация о концепции
Предпочитаемый термин
Ion beam deposition
Определение
- Ion beam deposition (IBD) is a process of applying materials to a target through the application of an ion beam. (Wikipedia)
Концепция более широкого понятия
URI
https://purls.helmholtz-metadaten.de/evoks/sdv/ionBeamDeposition
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