Conceptinformatie
Voorkeursterm
Reactive ion etching (RIE/IBE)
Breder concept
URI
https://purls.helmholtz-metadaten.de/evoks/sdv/reactiveIonRIEIBE
{{label}}
{{#each values }} {{! loop through ConceptPropertyValue objects }}
{{#if prefLabel }}
{{/if}}
{{/each}}
{{#if notation }}{{ notation }} {{/if}}{{ prefLabel }}
{{#ifDifferentLabelLang lang }} ({{ lang }}){{/ifDifferentLabelLang}}
{{#if vocabName }}
{{ vocabName }}
{{/if}}