Conceptinformatie
Voorkeursterm
Ion implantation
Definitie
- Ion implantation is a low-temperature process by which ions of one element are accelerated into a solid target, thereby changing the physical, chemical, or electrical properties of the target. (Wikipedia)
Breder concept
URI
https://purls.helmholtz-metadaten.de/evoks/sdv/ionImplantation
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