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Conceptinformatie

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Focused ion beam  

Definitie

  • An instrument that combines the use of a focused beam of gallium ions to etch or coat a sample with a scanning electron microscope to image the sample. (TIB, NCI Thesaurus OBO Edition)

URI

https://purls.helmholtz-metadaten.de/evoks/sdv/focusIonBeam

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