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Anbefalt term

Sputtering  

Definisjon

  • In physics, sputtering is a phenomenon in which microscopic particles of a solid material are ejected from its surface, after the material is itself bombarded by energetic particles of a plasma or gas (Wikipedia)

Overordnede begreper

URI

https://purls.helmholtz-metadaten.de/evoks/sdv/sputtering

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