Passer au contenu principal

sampleDescription

Choisissez le vocabulaire dans lequel chercher

Langue des données

Concept information

Preparation action > Mechanical and surface > Mechanical and surface method > Sputtering
Material description > Material treatment > Mechanical and surface > Mechanical and surface method > Sputtering

Terme préférentiel

Sputtering  

Définition

  • In physics, sputtering is a phenomenon in which microscopic particles of a solid material are ejected from its surface, after the material is itself bombarded by energetic particles of a plasma or gas (Wikipedia)

Concept générique

URI

https://purls.helmholtz-metadaten.de/evoks/sdv/sputtering

Télécharger ce concept :

RDF/XML TURTLE JSON-LD