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زبان محتوا

Concept information

... > Parent > Parent type > Sample > Material description > Material treatment > Deposition coating > Deposition coating method > Atomic layer deposition

اصطلاح مرجح

Atomic layer deposition  

تعریف

  • A thin film deposition technique based on the sequential reaction of gaseous precursors at a surface to produce a monolayer (TIB, Chemical Methods Ontology)

مفهوم اعم

URI

https://purls.helmholtz-metadaten.de/evoks/sdv/atomicLayerDeposition

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