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Preparation action > Mechanical and surface > Mechanical and surface method > Focused ion beam
... > Parent > Parent type > Sample > Material description > Material treatment > Mechanical and surface > Mechanical and surface method > Focused ion beam

Preferred term

Focused ion beam  

Definition

  • An instrument that combines the use of a focused beam of gallium ions to etch or coat a sample with a scanning electron microscope to image the sample. (TIB, NCI Thesaurus OBO Edition)

Broader concept

URI

https://purls.helmholtz-metadaten.de/evoks/sdv/focusIonBeam

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