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Preparation action > Mechanical and surface > Mechanical and surface method > Sputtering
... > Parent > Parent type > Sample > Material description > Material treatment > Mechanical and surface > Mechanical and surface method > Sputtering

Preferred term

Sputtering  

Definition

  • In physics, sputtering is a phenomenon in which microscopic particles of a solid material are ejected from its surface, after the material is itself bombarded by energetic particles of a plasma or gas (Wikipedia)

Broader concept

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https://purls.helmholtz-metadaten.de/evoks/sdv/sputtering

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