Angaben zum Begriff
Bevorzugte Bezeichnung
Sputter coating
Definition
- A piece of apparatus, consisting of an anode (the specimen) a cathode (the source of sputter atoms or 'target') and a magnet, all held inside a vacuum chamber, which is used to coat specimens with a thin layer of atoms (e.g. Au) prior to microscopy. (TIB, Chemical Methods Ontology)
Oberbegriff
URI
https://purls.helmholtz-metadaten.de/evoks/sdv/sputterCoating
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