Angaben zum Begriff
Bevorzugte Bezeichnung
Pulsed laser deposition
Definition
- A synthesis technique where a high-power pulsed laser beam is focused (inside a vacuum chamber) onto a target of the desired composition. Material is then vaporized from the target ('ablation') and deposited as a thin film on a substrate facing the target. (TIB, Chemical Methods Ontology)
Oberbegriff
URI
https://purls.helmholtz-metadaten.de/evoks/sdv/pulsedLaserDepos
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