Concept information
优选词，正式主题词
Mechanical stress
定义
- 1. Mechanical stress refers to the internal forces within a material that arise from factors such as film structural properties and thermal expansion coefficients. It can cause device degradation and affect the diffusion behavior of impurities during processing. (ScienceDirect, AI generated definition based on: Rapid Thermal Processing, 1993). 2. A physical force that acts on an object and can damage or change the shape of the object (Cambridge dictionary)
URI
https://purls.helmholtz-metadaten.de/evoks/sdv/MechanicalStress
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