Concept information
优选词,正式主题词
Electron beam deposition
定义
- A synthesis method where an electron beam is used to decompose gaseous molecules leading to deposition of a solid on a nearby substrate. (Ontobee, Chemical Methods Ontology)
上位概念
URI
https://purls.helmholtz-metadaten.de/evoks/sdv/ElectronBeamDeposition
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