Hoppa till innehållet

SampleDescriptionVocabulary

Sök i vokabulär

Innehållets språk

Begreppsinformation

... > Sample > Material > Material processing > Material treatment > Surface structuring > Surface structuring method > Lithography > Electron beam lithography
... > Sample > Sample preparation > Sample preparation method > Mechanical and surface treatment > Mechanical and surface treatment method > Surface structuring > Surface structuring method > Lithography > Electron beam lithography

Föredragen term

Electron beam lithography  

Överordnat begrepp

URI

https://purls.helmholtz-metadaten.de/evoks/sdv/ElectronBeamLithography

Ladda ned detta begrepp:

RDF/XML TURTLE JSON-LD