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Informação do conceito

... > Sample > Material > Material processing > Material treatment > Surface structuring > Surface structuring method > Lithography > Electron beam lithography
... > Sample > Sample preparation > Sample preparation method > Mechanical and surface treatment > Mechanical and surface treatment method > Surface structuring > Surface structuring method > Lithography > Electron beam lithography

Termo preferencial

Electron beam lithography  

Conceito superordenado

URI

https://purls.helmholtz-metadaten.de/evoks/sdv/ElectronBeamLithography

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