Informasjon om omgrepet
Tilrådd term
Sputter coating
Definisjon
- 1. Sputter coating in scanning electron microscopy is a sputter deposition process[clarification needed] to cover a specimen with a thin layer of conducting material, typically a metal, such as a gold/palladium (Au/Pd) alloy. (Wikipedia). 2. A synthesis technique where a solid target is bombarded with electrons or energetic ions (e.g. Ar+) causing atoms to be ejected ('sputtering'). The ejected atoms then deposit, as a thin-film, on a substrate. (TIB, Chemical Methods Ontology)
Overordna omgrep
URI
https://purls.helmholtz-metadaten.de/evoks/sdv/SputterCoating
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