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Conceptinformatie

... > Material type > Coating > Coating method > Deposition coating > Sputter coating
... > Material form > Coating > Coating method > Deposition coating > Sputter coating
... > Sample > Sample preparation > Sample preparation method > Mechanical and surface treatment > Mechanical and surface treatment method > Coating > Coating method > Deposition coating > Sputter coating
... > Sample > Sample preparation > Sample preparation method > Material aggregation > Coating > Coating method > Deposition coating > Sputter coating
... > Sample > Material > Material processing > Surface treatment > Coating > Coating method > Deposition coating > Sputter coating

Voorkeursterm

Sputter coating  

Definitie

  • 1. Sputter coating in scanning electron microscopy is a sputter deposition process[clarification needed] to cover a specimen with a thin layer of conducting material, typically a metal, such as a gold/palladium (Au/Pd) alloy. (Wikipedia). 2. A synthesis technique where a solid target is bombarded with electrons or energetic ions (e.g. Ar+) causing atoms to be ejected ('sputtering'). The ejected atoms then deposit, as a thin-film, on a substrate. (TIB, Chemical Methods Ontology)

Breder concept

URI

https://purls.helmholtz-metadaten.de/evoks/sdv/SputterCoating

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