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SampleDescriptionVocabulary

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... > Sample > Material description > Material type > Coating > Coating method > Deposition coating > Physical vapor deposition
... > Sample > Material description > Material form > Coating > Coating method > Deposition coating > Physical vapor deposition
... > Sample > Material description > Material processing > Material treatment > Coating > Coating method > Deposition coating > Physical vapor deposition

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Physical vapor deposition  

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https://purls.helmholtz-metadaten.de/evoks/sdv/PhysicalVaporDeposition

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