Concept information
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Ion Beam
Definizione
- 1. Directed flux of charged atoms or molecules. (IUPAC). 2. In IBM a stream of charged atoms (ions) of an inert gas, such as argon, is accelerated in a vacuum by high energies and directed toward a solid workpiece. The beam removes atoms from the workpiece by transferring energy and momentum to atoms on the surface of the object. When an atom strikes a cluster of atoms on the workpiece, it dislodges between 0.1 and 10 atoms from the workpiece material. (Britannica).
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URI
https://purls.helmholtz-metadaten.de/evoks/sdv/IonBeam
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