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Ion implantation  

Définition

  • 1. Ion implantation is a low-temperature process by which ions of one element are accelerated into a solid target, thereby changing the target's physical, chemical, or electrical properties. (Wikipedia). 2. Ion implantation is a material surface modification process by which ions of a material are implanted into another solid material, causing a change in the surface physical and chemical properties of the materials. (Science Direct, Surface Modification of Textiles Woodhead Publishing Series in Textiles 2009, Pages 58-90). 3. Implantation or Ion Implantation is a technique where ions are accelerated to a higher energy and speed an injected into a semiconductor. The dominant techniques for introducing dopants into a semiconductor. (TIB, Digital Reference)

Concept générique

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https://purls.helmholtz-metadaten.de/evoks/sdv/IonImplantation

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