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... > Material processing > Material treatment > Surface structuring > Surface structuring method > Lithography

... > Mechanical and surface treatment > Mechanical and surface treatment method > Surface structuring > Surface structuring method > Lithography

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Lithography

1. Any synthesis technique involving the transfer of a pattern to a material (a 'resist') by selective exposure to a radiation source (e.g. light or X-rays) or to a beam of charged particles. Upon irradiation, the material experiences a change in its physical properties. Excess material is then removed, by a liquid 'developer' or an etching process. (TIB, Chemical Methods Ontology). 2. The lithography process is the key process in frontend. This consists of the following steps: a photo resisting layer is spun on a wafer, then exposed through the mask, then developed, then showing the effect on the open places, and then final deletion of the photo resisting material leaves only the remaining structure on the water. after some time for deposition, these steps are repeated up to 35 times. (TIB, Digital Reference). 3. Lithography is a planographic printmaking process in which a design is drawn onto a flat stone (or prepared metal plate, usually zinc or aluminum) and affixed by means of a chemical reaction. (The Metropolitan Museum of Art).

Surface structuring method

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https://purls.helmholtz-metadaten.de/evoks/sdv/Lithography

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