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Concept information

... > Material type > Coating > Coating method > Deposition coating > Atomic layer deposition
... > Material form > Coating > Coating method > Deposition coating > Atomic layer deposition
... > Sample > Material > Material processing > Material treatment > Coating > Coating method > Deposition coating > Atomic layer deposition
... > Sample > Sample preparation > Sample preparation method > Mechanical and surface treatment > Mechanical and surface treatment method > Coating > Coating method > Deposition coating > Atomic layer deposition
... > Sample > Sample preparation > Sample preparation method > Material aggregation > Coating > Coating method > Deposition coating > Atomic layer deposition

Preferred term

Atomic layer deposition  

Broader concept

URI

https://purls.helmholtz-metadaten.de/evoks/sdv/AtomicLayerDeposition

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