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... > Sample > Sample preparation > Sample preparation method > Mechanical and surface treatment > Mechanical and surface treatment method > Sputtering

Preferred term

Sputtering  

Definition

  • 1. Sputtering is a phenomenon in which microscopic particles of a solid material are ejected from its surface, after the material is itself bombarded by energetic particles of a plasma or gas. (Wikipedia). 2. Removal of surface material (atoms, clusters and molecules) by particle bombardment. (IUPAC). 3. A process that uses ions of an inert gas to dislodge atoms from the surface of a crystalline material, the atoms then being electrically deposited to form an extremely thin coating on a glass, metal, plastic, or other surface. (dictionary.com)

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https://purls.helmholtz-metadaten.de/evoks/sdv/Sputtering

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