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... > Material description > Material type > Coating > Coating method > Ion implantation
... > Material description > Material form > Coating > Coating method > Ion implantation
... > Sample > Sample preparation > Sample preparation method > Mechanical and surface treatment > Mechanical and surface treatment method > Coating > Coating method > Ion implantation
... > Sample > Sample preparation > Sample preparation method > Material aggregation > Coating > Coating method > Ion implantation
... > Sample > Material > Material processing > Surface treatment > Coating > Coating method > Ion implantation

Preferred term

Ion implantation  

Definition

  • 1. Ion implantation is a low-temperature process by which ions of one element are accelerated into a solid target, thereby changing the target's physical, chemical, or electrical properties. (Wikipedia). 2. Ion implantation is a material surface modification process by which ions of a material are implanted into another solid material, causing a change in the surface physical and chemical properties of the materials. (Science Direct, Surface Modification of Textiles Woodhead Publishing Series in Textiles 2009, Pages 58-90). 3. Implantation or Ion Implantation is a technique where ions are accelerated to a higher energy and speed an injected into a semiconductor. The dominant techniques for introducing dopants into a semiconductor. (TIB, Digital Reference)

Broader concept

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https://purls.helmholtz-metadaten.de/evoks/sdv/IonImplantation

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