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... > Physical system > Processing and Treatment (for both Material and Sample) > Treatment > Material disintegration > Cutting > Cutting method > Ion Beam

Preferred term

Ion Beam  

Definition

  • 1. Directed flux of charged atoms or molecules. (IUPAC). 2. In IBM a stream of charged atoms (ions) of an inert gas, such as argon, is accelerated in a vacuum by high energies and directed toward a solid workpiece. The beam removes atoms from the workpiece by transferring energy and momentum to atoms on the surface of the object. When an atom strikes a cluster of atoms on the workpiece, it dislodges between 0.1 and 10 atoms from the workpiece material. (Britannica).

Broader concept

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https://purls.helmholtz-metadaten.de/evoks/sdv/IonBeam

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