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... > Sample > Material > Material processing > Material treatment > Surface structuring > Surface structuring method > Lithography > Focused Ion beam lithography
... > Sample > Sample preparation > Sample preparation method > Mechanical and surface treatment > Mechanical and surface treatment method > Surface structuring > Surface structuring method > Lithography > Focused Ion beam lithography

Preferred term

Focused Ion beam lithography  

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https://purls.helmholtz-metadaten.de/evoks/sdv/FocusedIonBeamLithography

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